Project information

Study of plasmachemical processes using microwave and optical spectroscopy

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Project Identification
Project Period
1/2001 - 1/2003
Investor / Pogramme / Project type
Czech Science Foundation
MU Faculty or unit
Faculty of Science

Selected plasmachemical reactions in various types of discharges (low pressure radiofrequency discharge, low pressure DC discharge, low pressure microwave discharge, atmospheric pressure microwave torch, atmospheric pressure glow, etc.) will be studied b y means of electron paramagnetic resonance (EPR) spectroscopy and optical emission spectroscopy (OES). The project will concentrate on three main research topics: (i) influence of admixtures on heterogeneous reactions on the surface of a discharge tube, particularly the surface recombination of atoms. Concentration of selected atoms in the afterglow will be measured in dependence on amount of impurity, afterglow position, wall temperature, etc. The goal is to understand better this process, describe it both experimentally and theoretically and finally draw the conclusions about possible applications in industry (e.g. higher nitridation rate). (ii) Determination of rate constants of main reactions between organosilicon compounds (TEOS, HMDSO, HMDSZ, OMT


Total number of publications: 35

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