Improved calibration procedure of an RF plasma impedance probe

• Authors: KUDRLE Vít; ZAJÍČKOVÁ Lenka; WIESEMANN Klaus
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceedings of ISPC 14
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: plasma impedance

Attached files

• ispc03.zip

• Description: Improved calibartion procedure of an RF plasma impedance probe

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• Study of plasmachemical processes using microwave and optical spectroscopy