Publication details
Measurement of ions in H2 - N2 capacitively coupled discharge
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Proceedings |
| Conference | Proceedings of XXVIII International Conference on Phenomena in Ionized Gases |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | ions; plasma ; capacitively coupled; hydrogen; nitrogen |
| Description | Neutral molecules and especially positive ions and their energy distributions were measured in low-pressure (ca 4 Pa) high frequency (13,56 MHz) capacitively coupled discharge ignited in the mixtures of hydrogen and nitrogen. Especially, the hydrogen-rich mixtures were investigated. Firstly, the energy dependence of the spectrometer was calculated and the ion energy distributions were corrected. The dominant ions were H3+ and HN2+. Ions without hydrogen (N2+ and N+) were significant only at low hydrogen concentration (less than 10%). Also a high amount of ions NH4+ was detected. The nitrogen addition caused a quite steep decrease of the dominant hydrogen ion H3+. Further, an unusual behaviour of NH4+ and H+ was observed. Concerning creation of neutral stable molecules, only a small amount of ammonia was detected. |
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