Modeling of reactive sputtering process with non-linear discharge current density

• Authors: SCHMIDTOVÁ Tereza; VAŠINA Petr
• Year of publication: 2008
• Type: Article in Proceedings
• Conference: Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: reactive magnetron sputering; target; discharge current density; racetrack
• Description: Modeling of reactive sputtering process with non-linear discharge current density, proceeding

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