Publication details
Thermal Desorption Spectroscopy Study on Diamond-like Carbon Coatings
| Authors | |
|---|---|
| Year of publication | 2009 |
| Type | Article in Proceedings |
| Conference | Frontiers in Low Temperature Plasma Diagnostic 8 |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | Thermal Desorption Spectroscopy; Diamond-like Carbon Coatings |
| Description | Nanostructured silicon-oxide containing diamond-like coatings were prepared with low compressive stress, high fracture toughness, low roughness, low friction coeficient and good adhesion to different substrates. The coatings were stable up to minimum 400 st.C. The hydrogen and hydrocarbon desorption did not cause deterioration of the films. |
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