Publication details
Measurement of plasma potential waveform by an uncompensated probe
| Authors | |
|---|---|
| Year of publication | 2010 |
| Type | Article in Periodical |
| Magazine / Source | Plasma Sources Sci. Technol. |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | plasma potential; probe; higher harmonic frequencies; capacitively coupled discharge; plasma |
| Description | A method is presented that enables measurement of plasma potential waveforms. The method consists of measurement by an uncompensated probe and analysis of the measured waveforms by means of a model of the sheath around the probe. The method was successfully tested in nitrogen capacitively coupled discharge. Strong influence of the sheath around the probe on the probe voltage and correlation between the probe current waveform and the discharge current are shown. At low pressure, the plasma potential waveform contains high amount of higher harmonic frequencies whose amplitudes are comparable with the amplitude of the fundamental frequency. |
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