Experimental study of hybrid PVD-PECVD process of titanium target sputtering in argon and acetylene

• Authors: SCHMIDTOVÁ Tereza; VAŠINA Petr; SOUČEK Pavel
• Year of publication: 2011
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: This contribution deals with the experimental study of hybrid PVD-PECVD process of titanium sputtering in argon and acetylene.

Related projects

• Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
• Plazmochemické procesy a jejich technologické aplikace
• CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy