Publication details

Experimental study of hybrid PVD-PECVD process of titanium target sputtering in argon and acetylene

Authors

SCHMIDTOVÁ Tereza VAŠINA Petr SOUČEK Pavel

Year of publication 2011
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description This contribution deals with the experimental study of hybrid PVD-PECVD process of titanium sputtering in argon and acetylene.
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