Publication details
Calculation of higher harmonic frequencies generated in capacitively coupled discharges
| Authors | |
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| Year of publication | 2013 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | Capacitively coupled discharge was modeled as a series combination of two nonlinear sheaths, a bulk plasma and a RF generator. This equivalent circuit was used for calculation of electric characteristics of capacitively coupled discharges including the spontaneous generation of higher harmonic frequencies of discharge current and sheath voltages. The calculation was realized both for single- and for double-frequency discharges. Mutual influences of discharge asymmetry, higher harmonic frequencies and amplitude of discharge voltage were studied. Various effects of plasma resonances and coupling of higher harmonic frequencies were observed and behaviour of higher harmonic frequencies in collisional plasma at high pressure was predicted. |
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