Publication details

INFLUENCE OF Ni DOPING ON PROPERTIES OF Ti-C NANOCOMPOSITE COATING PREPARED BY HYBRID PVD-PECVD PROCESS

Authors

DANIEL Josef SOUČEK Pavel ZÁBRANSKÝ Lukáš JURMANOVÁ Jana BURŠÍKOVÁ Vilma VAŠINA Petr

Year of publication 2013
Type Article in Proceedings
Conference PAPN 2013: Book of Extended Abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords titanium carbide; ternary carbides; magnetron sputtering; hard coatings
Description The nc-TiC/a-C(:H) coatings doped by nickel were prepared by hybrid PVD-PECVD process. Ni pellets were placed on titanium target and they were sputtered in mixture of argon and acetylene atmosphere. We found that C2H2 inlet position and the flow rate of acetylene has significant influence on composition of coatings. Mechanical properties were also determined.
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