Publication details
Antireflexní vrstva z materiálů Al2O3/SiO2 pro hlubokou ultrafialovou (DUV) oblast spektra na vlnové délce 266nm
| Title in English | Antireflection coating consisting of Al2O3/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm |
|---|---|
| Authors | |
| Year of publication | 2014 |
| MU Faculty or unit | |
| Description | *Multi-layer antireflection coating consisting of Al2O3/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm |
| Related projects: |