Publication details
Využití hydridního PVD-PECVD procesu pro růst TiCC II vrstev na zařízení s rotačními katodami
| Title in English | Employing hybrid PVD-PECVD process with rotating cylindrical magnetron to grow TiCC II coatings |
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| Authors | |
| Year of publication | 2014 |
| Type | Research report |
| MU Faculty or unit | |
| Description | Technology development of lubricant TiCC II coatings using device with rotating cathodes of Platit a.s. company |