Publication details

Spokes and cathode voltage and discharge current oscillations in HiPIMS

Authors

HNILICA Jaroslav KLEIN Peter HUBIČKA Zdeněk ČADA Martin VAŠINA Petr

Year of publication 2015
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Oscillations were observed on cathode voltage and discharge current temporal evolution of HiPIMS pulse. The frequency of the oscillations depends only on the actual value of the discharge current for given pressure. Rotation of the spokes over the target surface and the frequency of the oscillations on cathode voltage and discharge current show different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges.
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