Publication details

Observation of cathode voltage and discharge current oscillations and spoke behaviour in HiPIMS

Authors

KLEIN Peter HNILICA Jaroslav HUBIČKA Zdeněk ČADA Martin VAŠINA Petr

Year of publication 2015
Type Article in Proceedings
Conference Book of Contributed Papers
MU Faculty or unit

Faculty of Science

Citation
Web https://munispace.muni.cz/index.php/munispace/catalog/book/792
Field Plasma physics
Keywords HiPIMS; spokes; magnetron sputtering; plasma instabilities
Description The oscillations were observed on cathode voltage and discharge current temporal evolution in HiPIMS pulse. The frequency of the oscillations depends at given pressure only on actual value of the discharge current. Rotation of the spokes over the cathode and the frequency of the oscillations shows different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges.
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