Publication details
Atomic layer deposition on plasma pre-treated flexible polymer surfaces
| Authors | |
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| Year of publication | 2016 |
| Type | Chapter of a book |
| MU Faculty or unit | |
| Citation | |
| Description | In this work, we deposited an ultra-thin layer of TiO2 by atomic layer deposition (ALD) with a low number of cycles, up to 100. This led to non-uniform film with thickness less than several nm. |
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