Publication details

Temporal evolution of Ti sputtered species number densities in multi-pulse HiPIMS process

Authors

FEKETE Matej HNILICA Jaroslav SOUČEK Pavel ZÁBRANSKÝ Lukáš VAŠINA Petr

Year of publication 2017
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description The aim of this paper is to study the temporal evolutions of sputtered species number densities during a preceding (P) and a subsequent (S) pulse in a multi-pulse HiPIMS. The Ti atom number density does not reach the maximum at the time of the maximal discharge current. It is shown that the residual particles from the P pulse are presented at the beginning of the S pulse even for the longest studied delay between the P and the S pulse. The ionization fractions of sputtered species attained at the end of the S pulses are always lower compared to the P pulse. The coatings produced by multi-pulse HiPIMS exhibited decreased roughness and increased hardness in comparison with standard HiPIMS and DC magnetron sputtered coating.
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