Publication details
Boron-based thin layers deposited by RF plasma jet with slit nozzle
| Authors | |
|---|---|
| Year of publication | 2016 |
| Type | Article in Proceedings |
| Conference | HAKONE XV: INTERNATIONAL SYMPOSIUM ON HIGH PRESSURE LOW TEMPERATURE PLASMA CHEMISTRY: WITH JOINT COST TD1208 WORKSHOP: NON-EQUILIBRIUM PLASMAS WITH LIQUIDS FOR WATER AND SURFACE TREATMENT |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | friction coefficient; RF plasma jet; trimethyl borate |
| Description | Preparation of thin layers with low friction coefficient using RF atmospheric pressure plasma slit jet system with addition of organic precursor aerosol. |
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