Publication details
Trajectory displacement in a multi beam scanning electron microscope
| Authors | |
|---|---|
| Year of publication | 2021 |
| Type | Article in Periodical |
| Magazine / Source | Ultramicroscopy |
| Citation | |
| Web | https://doi.org/10.1016/j.ultramic.2021.113223 |
| Doi | http://dx.doi.org/10.1016/j.ultramic.2021.113223 |
| Keywords | Trajectory displacement; Multi-beam electron microscope; Coulomb interactions; Slice method; Electron optics |
| Description | The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system. |