X-ray scattering study of interface roughness correlation in Mo/Si and Ti/C multilayers for X-UV optics

• Authors: JERGEL M.; HOLÝ Václav; MAJKOVÁ E.; LUBY S.; SENDERÁK R.; STOCK H.J.; MENKE D.; KLEINEBERG U.; HEINZMANN U.
• Year of publication: 1998
• Type: Article in Periodical
• Magazine / Source: Physica B condensed matter
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism

Related projects

• Laboratory of thin films and nanostructures