Publication details
Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings
| Authors | |
|---|---|
| Year of publication | 1998 |
| Type | Paper in proceedings |
| Conference | ICPP |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | mechanical propertires; thin Films; PECVD |
| Description | Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings |