Publication details
Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD
| Authors | |
|---|---|
| Year of publication | 1998 |
| Type | Article in Proceedings |
| Conference | 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | carbon films; deposition; PECVD |
| Description | Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD |