Kinetics of N2+HMDSZ gas phase chemical reactions in a remote RF plasma reactor with electron spin resonance

• Authors: JANČA Marek; JANČA Jan; KUDRLE Vít; TÁLSKÝ Antonín
• Year of publication: 1999
• Type: Article in Proceedings
• Conference: Proceedings of 14th International Symposium on Plasma Chemistry
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics

Attached files

• ispc99.zip

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