Publication details
Prototyp optického prvku č. 3 s povrchovou úpravou
| Title in English | Prototype of optical element #3 with surface treatment. |
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| Authors | |
| Year of publication | 2025 |
| Type | Outcomes put into operation (prototype, working sample) |
| MU Faculty or unit | |
| Description | Polyetheretherketone (PEEK) was used to fabricate the optical part of a scanning electron microscope column. The optical element was subsequently coated with a thin conductive layer (50 nm Mo/C and 10 nm ITO) applied by magnetron sputtering, providing high conductivity and purity essential for vacuum operation. The coverage and uniformity of the layer were carefully tested using a special holder allowing precise cross-sections. Based on property verification, a functional prototype of the device was produced. |
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