Publication details

Deposition of HMDSO-Based Plasma Polymer Coatings on Glass via an Atmospheric Pressure Diffuse Coplanar Surface Barrier Discharge

Authors

ĎURČÁNYOVÁ Sandra STUPAVSKÁ Monika GHOURCHI BEIGI Pedram LIČKOVÁ Petra STANO Michal SLAVÍČEK Pavel ZAHORANOVÁ Anna KOVÁČIK Dušan

Year of publication 2026
Type Article in Periodical
Magazine / Source Plasma Processes and Polymers
MU Faculty or unit

Faculty of Science

Citation
web https://doi.org/10.1002/ppap.70187
Doi https://doi.org/10.1002/ppap.70187
Keywords atmospheric pressure plasma; DCSBD; hexamethyldisiloxane; plasma polymerization; thin films
Description This work deals with plasma polymerization at atmospheric pressure for the fabrication of functional hydrophobic coatings on glass. A mixture of nitrogen and hexamethyldisiloxane (HMDSO) was used as the working gas, while the plasma was generated by a Diffuse Coplanar Surface Barrier Discharge (DCSBD). Wettability, chemical composition, and morphology were studied for layers prepared under different working conditions, with the focus on the effect of exposure time, input power, and post-treatment. The deposition rate was estimated at 162 nm/min. Aging tests showed chemical stability of the prepared layers, and an increase in hydrophobicity attributed to UV exposure, which indicates the potential of using UV radiation as a post-treatment method.
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