In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction

• Authors: ZHUANG Y.; PIETSCH U.; STANGL J.; HOLÝ Václav; DAROWSKI N.; GRENZER J.; ZERLAUTH S.; SCHÄFFLER F.; BAUER G.
• Year of publication: 2000
• Type: Article in Periodical
• Magazine / Source: Physica B
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
• Description: In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction

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