Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study

• Authors: ANOPCHENKO A.; JERGEL M.; MAJKOVA E.; HOLY V.
• Year of publication: 2001
• Type: Article in Periodical
• Magazine / Source: Physica B
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Description: Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study

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