GID study of strains in Si due to patterned SiO2

• Authors: DANIEL A.; HOLÝ Václav; BAUER G.
• Year of publication: 2001
• Type: Article in Periodical
• Magazine / Source: J. Phys.D.: Appl. Phys.
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Description: GID study of strains in Si due to patterned SiO2

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