Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings

• Authors: BURŠÍKOVÁ Vilma; SLÁDEK Petr; SŤAHEL Pavel; ZAJÍČKOVÁ Lenka
• Year of publication: 2002
• Type: Article in Periodical
• Magazine / Source: Journal of Non-Crystalline Solids
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: silicon solar cells; antireflective coatings; diamond-like films; PECVD
• Description: Silicon incorporated diamond-like antireflective coatings were deposited upon the silicon solar cells in order to improve their efficiency. The films were prepared by plasma enhanced chemical vapor deposition (PECVD) technique from the mixture of hexamethyldisiloxane (HMDSO) and methane. The optical and tribological properties of the coatings could be easily changed by the percentage of the HMDSO in the deposition feed.

Related projects

• Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate
• Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used
• Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method
• Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates