Optical Emission and Absorption Spectroscopy Measurements in a Microwave Assisted IPVD Reactor

• Authors: VAŠINA Petr; DE POUQUEC Ludovic; LEROY Olivier; PAGNON Daniel; TEULÉ-GAY Lionel; BOISSE-LAPORTE Caroline; TOUZEAU Michel
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceeding of Internation Conference on Phenomena in Ionized Gases, Volume 3
• MU Faculty or unit: Rector's Office