Effect of the Discharge Conditions on the Mechanical Properties of the Plasma Deposited DLC:SiOx Films

• Authors: BURŠÍKOVÁ Vilma; DVOŘÁK Pavel; ZAJÍČKOVÁ Lenka; KLAPETEK Petr; BURŠÍK Jiří; JANČA Jan
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceedings of SAPP XIV
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: discharge conditions; mechanical properties; plasma deposited films
• Description: Hard diamond like carbon films with insorporation of SiOx were deposited from mixture of methane and HMDSO. The Hardness, elastic modulus, interfacial fracture toughness and their dependence on the HMSDO to methane ratio were studied. The correlation between the discharge parameters and the film properties was determined.

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