Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films

• Authors: BURŠÍKOVÁ Vilma; SLÁDEK Petr; SŤAHEL Pavel; BURŠÍK Jiří
• Year of publication: 2006
• Type: Article in Periodical
• Magazine / Source: Journal of Non-Crystalline Solids
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films
• Description: In the paper we present a complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films.

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