Depth sensing indentation at nano- and microscale

• Authors: BURŠÍKOVÁ Vilma; STRATIL P.; BLÁHOVÁ O.; BURŠÍK J.; DUŠEK Jiří; NAVRÁTIL Vladislav; KLAPETEK P
• Year of publication: 2006
• Type: Article in Proceedings
• Conference: 2. Slovensko - Český seminár "Lokálne mechanické vlastnosti
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: Depth sensing indentation; nano; microscale
• Description: Depth Sensing Indentation is a new method of thin films characterisation. The advantage of the method is discussed in somparison with classical Vickers hardness method.

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