Optical emission spectroscopy of microwave plasma torch during deposition of carbon nanotubes

• Authors: ELIÁŠ Marek; JAŠEK Ondřej; ZAJÍČKOVÁ Lenka; FRGALA Zdeněk; KUDRLE Vít
• Year of publication: 2006
• Type: Article in Proceedings
• Conference: In Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: carbon-nanotubes-deposition-optical-emission-spectroscopy
• Description: We perfomed the ptical emission spectroscopy of microwave plasma torch during the process of plasmachemical deposition of carbon nanotubes.

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