Publication details
Laser Ablation Time-of-Flight Mass Spectrometry LA-TOF-MS of Nitrogen Doped Diamond-Like Carbon DLN Nano-Layers
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Periodical |
| Magazine / Source | Journal of Physics and Chemistry of Solids |
| MU Faculty or unit | |
| Citation | |
| Web | http://www.elsevier.com |
| Field | Plasma physics |
| Keywords | Diamond like thin films; Amorphous materials; Vapor deposition |
| Description | Nitrogen-doped diamond-like carbon layers (a-C:H:N, N-DLC or DLN) were prepared by the plasma enhanced chemical vapor deposition (PECVD) technique.The films, of differing deposition times,were subjected to laser ablation time-of-flight (LA-TOF) mass spectrometric measurements.The analysis of mass spectra was made and the following positively singly-charged species were detected and identified: Cn+ (n = 4 - 30), Sin+ (n = 2, 3),SinH+ (n = 2, 3), SiOK+, Si3H4+, Si2N+, Si2NH2+, and Si3C+. |
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