Studying an influence of a nucleation phase on nanocrystalline diamond film properties

• Authors: KARÁSKOVÁ Monika; ZAJÍČKOVÁ Lenka; JAŠEK Ondřej; BURŠÍKOVÁ Vilma; FRANTA Daniel; MATĚJKOVÁ Jiřina; KLAPETEK Petr
• Year of publication: 2007
• Type: Peer-reviewed scientific article
• Magazine / Source: Acta Metallurgica Slovaca
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: nanokrystalline diamond; plasma enhanced CVD; bias enhanced nucleation; hardness
• Description: In the present paper we studied influence of a nucleation phase on nanocrystalline diamond film properties. We determined the mechanical and optical properties of the prepared samples. The surface was studied using AFM and HRSEM techniques.

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