Publication details

Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

Authors

KELAR Lukáš BURŠÍKOVÁ Vilma BOCHNÍČEK Zdeněk

Year of publication 2008
Type Article in Proceedings
Conference CESPC II - Book of extended abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords carbon films ;PECVD
Description Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD
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