Publication details
DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE
| Authors | |
|---|---|
| Year of publication | 2008 |
| Type | Article in Periodical |
| Magazine / Source | Chemické Listy, II Central European Symposium on Plasma Chemistry 2008 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | plasma deposition |
| Description | THIN FILMS WERE DEPOSITED IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE. THE HARDNESS OF THESE FILMS WAS INCREASED IN COMPARISON WITH FILMS DEPOSITED IN N2 + HMDSO ATMOSPHERE. |
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