Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport

• Authors: VAŠINA Petr; MEŠKO Marcel; DE POUCQUES Ludovic; BRETAGNE Jean; BOISSE-LAPORTE Caroline; TOUZEAU Michel
• Year of publication: 2008
• Type: Article in Periodical
• Magazine / Source: Plasma Sources Science and Technology
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: high power pulses; magnetron
• Description: Papers study by means of time and space resolved measurement of substrate holder current the transport of ionized sputtered particlef from the magnetron cathode towards the substrate.

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