Suppressed hysteresis behaviour of Ti sputtering in acetylene gas

• Authors: SCHMIDTOVÁ Tereza; VAŠINA Petr; ELIÁŠ Marek
• Year of publication: 2010
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: Suppressed hysteresis behaviour of Ti sputtering in acetylene gas. Modelling of hybrid PVD-PECVD process.

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