Publication details

Defect Engineering in Czochralski-grown Silicon Studied by TEM

Authors

SVOBODA Milan BURŠÍK Jiří MEDUŇA Mojmír CAHA Ondřej KUBĚNA Josef

Year of publication 2010
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description As a part of a complex study of nucleation and growth of oxygen precipitates in Czochralski-grown silicon this work reports our latest results obtained by TEM.
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