Influence of DLC films on higher harmonic frequencies in capacitive discharges

• Authors: DVOŘÁK Pavel; BURŠÍKOVÁ Vilma; ŽEMLIČKA Radek; HOMOLA Vojtěch
• Year of publication: 2011
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: Influence of creation or destruction of a DLC film on Fourier components of discharge voltage including higher harmonic frequencies is studied. Fourier components react sensitively on the film presence which can be explained as an influence of the coefficient of secondary electron emission on the electron concentration.

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