Publication details
Determination of mechanical properties from microcompression test
| Authors | |
|---|---|
| Year of publication | 2012 |
| Type | Article in Proceedings |
| Conference | Engineering Mechanics 2012, Book of Extended Abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Material fatigue and breakage mechanics |
| Keywords | microcompression; thin film properties; focused ion beam; Young modulus; FEM |
| Attached files | |
| Description | This paper describes a microcompression test of thin Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 um and their height was about 2 um (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling. |