Design and construction of the equipment for in-situ measurement of thin film surface homogeneity
The project proposal is aimed at a design and construction of the compact equipment for in-situ measurement of thin film surface homogeneity. This equipment consists of a stable source of white light, CCD camera and dual spectrophotometer. The function o f the instrument (based on an original method of the detection of the white light scattered from the growing thin film in a CCD camera) will be verified via its installation onto a vacuum deposition chamber containing two Kaufman's broad ion beam sources - (IBAD). The results will be utilized in the deposition process control and thus we should be able to prepare the multilayer structures with a defined optical properties. The advantage of the apparatus is its wide applicability for in-situ control of t hin films deposited by other technologies. In the project students of the Master and PhD degree cource will be involved.
Total number of publications: 4