Project information

Design and construction of the equipment for in-situ measurement of thin film surface homogeneity

Investor logo
Project Identification
Project Period
1/1998 - 1/2000
Investor / Pogramme / Project type
Czech Science Foundation
MU Faculty or unit
Faculty of Science
Cooperating Organization
Brno University of Technology

The project proposal is aimed at a design and construction of the compact equipment for in-situ measurement of thin film surface homogeneity. This equipment consists of a stable source of white light, CCD camera and dual spectrophotometer. The function o f the instrument (based on an original method of the detection of the white light scattered from the growing thin film in a CCD camera) will be verified via its installation onto a vacuum deposition chamber containing two Kaufman's broad ion beam sources - (IBAD). The results will be utilized in the deposition process control and thus we should be able to prepare the multilayer structures with a defined optical properties. The advantage of the apparatus is its wide applicability for in-situ control of t hin films deposited by other technologies. In the project students of the Master and PhD degree cource will be involved.


Total number of publications: 4

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