Project information
Design and construction of the equipment for in-situ measurement of thin film surface homogeneity
- Project Identification
- GA101/98/0772
- Project Period
- 1/1998 - 1/2000
- Investor / Pogramme / Project type
-
Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
- Cooperating Organization
-
Brno University of Technology
- Responsible person prof. RNDr. Jiří Spousta, Ph.D.
The project proposal is aimed at a design and construction of the compact equipment for in-situ measurement of thin film surface homogeneity. This equipment consists of a stable source of white light, CCD camera and dual spectrophotometer. The function o f the instrument (based on an original method of the detection of the white light scattered from the growing thin film in a CCD camera) will be verified via its installation onto a vacuum deposition chamber containing two Kaufman's broad ion beam sources - (IBAD). The results will be utilized in the deposition process control and thus we should be able to prepare the multilayer structures with a defined optical properties. The advantage of the apparatus is its wide applicability for in-situ control of t hin films deposited by other technologies. In the project students of the Master and PhD degree cource will be involved.
Publications
Total number of publications: 4
2001
-
Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy
Surface and Interface Analysis, year: 2001, volume: 32, edition: 1
2000
-
Atomic force microscopy measurements of surface roughness quantities important in optics of surfaces and thin films
Proceedings of the 4th Seminar on Quantitative Microscopy, year: 2000
-
Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry
Surface and Interface Analysis, year: 2000, volume: 30, edition: 1
1998
-
Comparison of AFM and optical methods at measuring nanometric surface roughness
Proceedings of the 3th Seminar on Quantitative Microscopy, year: 1998