Comparison of AFM and optical methods at measuring nanometric surface roughness

• Authors: OHLÍDAL Ivan; FRANTA Daniel; OHLÍDAL Miloslav; VIČAR Martin; KLAPETEK Petr
• Year of publication: 1998
• Type: Article in Proceedings
• Conference: Proceedings of the 3th Seminar on Quantitative Microscopy
• MU Faculty or unit: Faculty of Science
• web: http://hydra.physics.muni.cz/~franta/bib/PTBF34_123.html
• Field: Solid matter physics and magnetism
• Description: In this contribution a comparison of the values of basic quantities characterizing random nanometric surface roughness determined by AFM and optical methods is presented.

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