Publication details
Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition
| Authors | |
|---|---|
| Year of publication | 2012 |
| Type | Article in Proceedings |
| Conference | Vrstvy a povlaky 2010: Zborník prednášok |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | hybrid PVD-PECVD; magnetron sputtering |
| Description | This paper dsiscusses the tybrid PVD-PECVD process and its application for carbon ritch nanocomposite thin film deposition |
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