Publication details

Hybrid PVD-PECVD Process and Its Application for Carbon Ritch Nanocomposite Thin Film Deposition

Authors

VAŠINA Petr SCHMIDTOVÁ Tereza SOUČEK Pavel BURŠÍKOVÁ Vilma

Year of publication 2012
Type Article in Proceedings
Conference Vrstvy a povlaky 2010: Zborník prednášok
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords hybrid PVD-PECVD; magnetron sputtering
Description This paper dsiscusses the tybrid PVD-PECVD process and its application for carbon ritch nanocomposite thin film deposition
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