Publication details

Space-filling arrays of three-dimensional epitaxial Ge and Si1-xGex crystals

Authors

FALUB C.V. ISA F. KREILIGER T. BERGAMASCHINI R. MARZEGALLI A. TABOADA A.G. CHRASTINA D. ISELLA G. MÜLLER E. NIEDERMANN P. DOMMANN A. NEELS A. PEZOUS A. MEDUŇA Mojmír MIGLIO L. VON KÄNEL Hans

Year of publication 2012
Type Article in Proceedings
Conference 2012 International Silicon-Germanium Technology and Device Meeting, ISTDM 2012 - Proceedings
MU Faculty or unit

Central European Institute of Technology

Citation
Doi http://dx.doi.org/10.1109/ISTDM.2012.6222457
Field Solid matter physics and magnetism
Keywords silicon; heteroepitaxy; x-ray diffraction
Description The crystalline quality, tilt and strain of the Ge and Si1-xGex crystals were investigated by high resolution X-ray diffraction.
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