Publication details

Evolution of discharge current in high power impulse magnetron sputtering

Authors

FEKETE Matej VAŠINA Petr KLEIN Peter

Year of publication 2013
Type Article in Proceedings
Conference PAPN 2013: Book of extended abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords HiPIMS; discharge current; magnetron sputtering; optical emission spectroscopy
Description High power impulse magnetron sputtering (HiPIMS) is nowadays often discussed topic. Physics of HiPIMS discharge is not completely understand yet. Even very basic characteristics of HiPIMS discharge like time resolved dependence of the cathode voltage and the discharge current are still discussed and interpreted. This research shows different regimes of time evolution of the discharge current depending on applied target voltage. Possible interpretation is presented.
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