Publication details

Hybrid PVD-PECVD Process and Its Applications for Carbon Rich Nanocomposite Thin Film Deposition

Authors

VAŠINA Petr SCHMIDTOVÁ Tereza SOUČEK Pavel BURŠÍKOVÁ Vilma

Year of publication 2013
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description This contibution deals with study of hybrid PVD-PECVD process and its applications for carbon rich nanocomposite thin film deposition
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