Publication details

Evolution of sputtered species densities in HiPIMS process with acetylene gas

Authors

BERNÁTOVÁ Katarína FEKETE Matej KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Year of publication 2017
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description We report the effect of increasing the mass flow rate of the acetylene gas on the sputtered Ti atom and ion ground state number densities using the spectroscopic method based on effective branching fractions in HiPIMS and DCMS process.
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