Publication details

Temporal evolution of sputtered species number densities in reactive HiPIMS with nitrogen admixture

Authors

BERNÁTOVÁ Katarína FEKETE Matej KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Year of publication 2019
Type Appeared in Conference without Proceedings
MU Faculty or unit

Faculty of Science

Citation
Description In this work, the nitrogen gas admixture effect on the temporal evolution of discharge current, voltage, pressure and ionization fraction of sputtered species in HiPIMS process is analyzed. The temporal evolution of an absolute number of sputtered titanium atom and ion density is estimated during the HiPIMS pulse using the spectroscopic method based on effective branching fractions. Furthermore, from the sputtered titanium atom and ion densities, the ionized titanium density fraction is estimated in the magnetized plasma region close to the cathode. The temporal ionized titanium density fraction evolution is similar to titanium ion density evolution across the all hysteresis curve. The ionization fraction of the sputtered species is around 90 % independently on the nitrogen gas flow.
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