Publication details

Zařízení pro zvýšení depoziční rychlosti HiPIMSu použitím balíčků pulzů

Title in English Device for deposition rate increase in HiPIMS using pulse packages
Authors

ČADA Martin HUBIČKA Zdeněk HNILICA Jaroslav KLEIN Peter VAŠINA Petr

Year of publication 2020
MU Faculty or unit

Faculty of Science

Description As a part of the TAČR project, we have developed a device for deposition rate increase in HiPIMS using pulse packages. The measured plasma parameters showed that the device is capable to double the deposition rate while the ionization fraction of sputtered species remain the same.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.

More info